Chidziwitso cha double beam scanning electron microscopy (DB-FIB)

Zida zofunika kwambiri pa njira zowunikira ma microanalysis ndi izi: ma microscope (OM), makina owonera ma electron microscopy (DB-FIB), scanning electron microscopy (SEM), ndi transmission electron microscopy (TEM).Nkhani yalero ifotokoza mfundo ndi kagwiritsidwe ntchito ka DB-FIB, ikuyang'ana kwambiri za kuthekera kwautumiki wa wailesi ndi kanema wawayilesi metrology DB-FIB komanso kagwiritsidwe ntchito ka DB-FIB pakusanthula kwa semiconductor.

Kodi DB-FIB ndi chiyani
Dual-beam scanning electron microscope (DB-FIB) ndi chida chomwe chimaphatikizira mtengo wa ion ndi sikani ya ma elekitironi pa microscope imodzi, ndipo ili ndi zida monga jekeseni wa gasi (GIS) ndi nanomanipulator, kuti akwaniritse ntchito zambiri. monga etching, kuyika zinthu, micro ndi nano processing.
Pakati pawo, lolunjika ion mtengo (FIB) Imathandizira ion mtengo kwaiye kwaiye madzi gallium zitsulo (Ga) ion gwero, ndiye imayang'ana pamwamba pa chitsanzo kupanga yachiwiri ma elekitironi chizindikiro, ndipo amasonkhanitsidwa ndi chowunikira.Kapena gwiritsani ntchito mtengo wamphamvu wa ion wapano kuti muyike zitsanzo zapang'ono ndi nano;Kuphatikizika kwa sputtering ndi machitidwe a gasi wamankhwala amathanso kugwiritsidwa ntchito posankha kapena kuyika zitsulo ndi zotsekera.

Ntchito zazikulu ndi kugwiritsa ntchito kwa DB-FIB
Ntchito zazikuluzikulu: kukonza magawo okhazikika, kukonzekera kwa zitsanzo za TEM, kusankha kapena kukulitsa etching, kuyika kwazitsulo zachitsulo ndikuyika kosanjikiza kosanjikiza.
Munda wogwiritsa ntchito: DB-FIB imagwiritsidwa ntchito kwambiri pazinthu za ceramic, ma polima, zida zachitsulo, biology, semiconductor, geology ndi magawo ena a kafukufuku ndi kuyesa kofananira kwazinthu.Makamaka, kuthekera kwapadera kwa DB-FIB kutengera chitsanzo chokonzekera kumapangitsa kuti zisalowe m'malo mwa kuthekera kosanthula kulephera kwa semiconductor.

GRGTEST DB-FIB kuthekera kwautumiki
DB-FIB yomwe pano ili ndi Shanghai IC Test and Analysis Laboratory ndi Helios G5 mndandanda wa Thermo Field, womwe ndi mndandanda wapamwamba kwambiri wa Ga-FIB pamsika.Zotsatizanazi zitha kukwaniritsa kusanthula kwa ma electron beam imaging m'munsi mwa 1 nm, ndipo zimakhala zokongoletsedwa bwino potengera magwiridwe antchito a ion mtengo komanso makina odzichitira okha kuposa m'badwo wakale wa ma electron microscopy amitundu iwiri.DB-FIB ili ndi ma nanomanipulators, ma jakisoni a gasi (GIS) ndi EDX yamphamvu kuti ikwaniritse zosowa zosiyanasiyana zowunikira kulephera kwa semiconductor.
Monga chida champhamvu chowunikira kulephera kwa katundu wa semiconductor, DB-FIB imatha kupanga makina osunthika m'magawo ang'onoang'ono mwatsatanetsatane wa nanometer.Panthawi imodzimodziyo ya FIB processing, kuwala kwa electron mtengo wokhala ndi nanometer resolution ingagwiritsidwe ntchito kuyang'ana mawonekedwe a microscopic morphology of cross-section ndikusanthula momwe akupangidwira mu nthawi yeniyeni.Kukwaniritsa kuyika kwazinthu zazitsulo zosiyanasiyana (tungsten, platinamu, ndi zina) ndi zinthu zopanda zitsulo (carbon, SiO2);Magawo a TEM owonda kwambiri amathanso kukonzedwa pamalo okhazikika, omwe amatha kukwaniritsa zofunikira pakuwunika kwapamwamba kwambiri pamlingo wa atomiki.
Tipitilizabe kugulitsa zida zapamwamba zamagetsi zamagetsi, kukonza ndikukulitsa luso lokhudzana ndi kulephera kwa semiconductor, ndikupatsa makasitomala mayankho atsatanetsatane komanso athunthu.